2013 Volume 82 Issue 7 Pages 601-604
Transparent and conductive oxide (TCO) thin films are used in practice, for various application fields; in particular, the market for transparent electrodes used in touch panels, flat panel displays or lamps and thin-film solar cells has expanded recently. TCO thin-film materials such as impurity-doped ZnO, In203 and Sn02 as well as multicomponent oxides composed of combinations of these binary compounds are the best candidates for practical use as transparent electrodes. The carrier transport and optical properties in polycrystalline TCO thin films with a carrier concentration on the order of 1020 to 1021 cm-3, i.e., degenerated n-type semiconductors, are explained by combining experimental results with theoretical analyses.
