2016 Volume 85 Issue 1 Pages 49-52
This article provides an introduction to the basics of vacuum science and technology. Firstly, the definition of a “vacuum” is given, and the kinetic theory of gases is briefly described. Secondly, the operation principles are explained for several popular types of vacuum pumps, i.e., a rotary pump, a turbomolecular pump, and a cryopump. Caution points for using vacuum pumps are also given. Because this article covers only a limited part of the wide range of vacuum technology, the readers are encouraged to read the more extensive literature for the operation of actual vacuum systems.
