The structural analysis and international standardization of a diamond-like carbon film

Abstract

An amorphous carbon film called “diamond-like carbon (DLC) film”, and the related materials are currently used as fundamental materials in a variety of industries due to their superior properties or low cost productivity. However, a standard evaluation method and classification of DLC film has not been established, because the structural analysis of DLC film has been difficult due to the structure being amorphous. Recently, an international standardization standard concerned with the DLC film was devised in ISO/TC107. The process and content of the ISO standard regarding the classification of the DLC film, and the structural evaluation methods of the DLC film, which is the fundamental information to be classified, are explained.