Fabrication and applications of high-Q optical nano- and micro-cavities

Abstract

High Q optical microcavities can enhance light-matter interactions because they can confine light in a small space. The applications cover a wide range of areas including all-optical signal processing and frequency-comb generation. In this paper we will introduce the fabrication and application of photonic crystal (PhC) nano-cavities and different types of whispering-galley-mode (WGM) micro-cavities. We will show our activities for the realization of the integration of photonic circuits by improving the CMOS compatibility of PhC nano-cavities. We will also introduce the development of silica-toroid, silica-rod and crystalline WGM micro-cavities fabricated with precise machining, and discuss different applications such as Kerr comb generation.