2019 Volume 88 Issue 10 Pages 663-667
Deep-ultraviolet (DUV) light-emitting diodes (LEDs) with UV-C emission wavelengths shorter than 280 nm have huge potential for a wide range of applications, including surface disinfection, air/water purification, medical diagnostics, lithographic microfabrication, and ICT. Rapid progress has been made recently in the development of AlGaN-based DUV-LEDs. However, DUV-LEDs continue to have much lower output power than the more widely used blue LEDs and traditional mercury lamps. We have studied DUV-LEDs with nanophotonic structures to significantly reduce the internal optical absorption and efficiency droop. In this paper, we show high-power single-chip 265 nm DUV-LEDs with output power in excess of 500 mW, bringing substantial advantages over conventional mercury vapor lamps.