Novel synthesis methods for dielectric oxynitrides

Abstract

Novel synthesis methods for perovskite-type oxynitrides without the use of gaseous ammonia are reported in this review. The direct synthesis of SrTaO₂N was performed from a mixture of SrCO₃ and Ta₃N₅ below 1000°C under flowing nitrogen. The oxynitride was also obtained from an SrTaO_3.5 precursor oxide using C₃N₄ as both the reduction and nitridation source at 800°C, which is 200°C lower than that required for ammonia nitridation reaction.