Various applications of process plasma measurement with vacuum ultraviolet absorption spectroscopy

Abstract

Plasma diagnostics with absorption spectroscopy is a powerful tool for understanding reactions of reactive species in process plasmas because it enables us to quantitatively-measure the density of species. First, in this article, for vacuum ultraviolet absorption spectroscopy with a plasma light source, the principle for measuring the absolute density of atomic species is explained. Next, as some examples of the applications, the results of surface loss probability measurements of atomic species on several materials, real-time density monitoring of atomic species in process plasmas, and measurements of reactive species in atmospheric pressure plasma are introduced. The measurement technique for reactive species in process plasma is expected to clarify the mechanism of process plasma reactions and improve the controllability of a plasma process.