Surface analysis of glass and ionic liquids with high-resolution Rutherford backscattering spectroscopy

Abstract

High-resolution Rutherford backscattering spectroscopy (HR-RBS) is a powerful tool for non-destructive compositional depth profiling of nano-scale thin film samples. It provides highly quantitative composition with sub-nm depth resolution. In this contribution, the analysis of insulating glass and ionic liquid solutions of alkali metal salts is presented to demonstrate the performance of HR-RBS for various types of samples.