Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Fundamental Lecture
Introduction to automatic data analysis in surface analysis
A data-driven approach to automate data analysis
Hideki YOSHIKAWA, Hiroshi SHINOTSUKA, Kenji NAGATA
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2023 Volume 92 Issue 1 Pages 41-45

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Abstract

Surface analysis requires the comprehensive knowledge and experience of analysts in sample treatment and data analysis in order to analyze the microstructure and chemical composition of a sample in a wide range of depth from the atomic layer to the micrometer. Therefore, the surface analysis is one of the most difficult techniques to automate the data analysis. To overcome this difficulty and automate data analysis, it is important to reveal the tacit experience of skilled analysts through a data-driven approach. In this basic course, we will introduce an example of automation of data analysis using a data-driven approach for X-ray photoelectron spectroscopy as one of the surface analysis methods.

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© 2023 The Japan Society of Applied Physics
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