Sensing of multiple gas molecules by integrated gas sensor consisting of ionic gel and multiple electrodes

Abstract

This study aims to develop integrated gas sensors for multiple gas sensing. A structure consisting of an ionic gel and multiple electrodes was proposed to realize the integration of gas sensors. Using two of the multiple electrodes, a voltage modulation by gas molecules at the ionic gal/electrode interface was detected by drain current measurement of an externally connected transistor. The voltage modulation depends on the electrode materials and gas molecules. From many kinds of time-series drain current derived from combinations of two electrodes in the multiple electrodes, concentrations of hydrogen, ammonia and ethanol were simultaneously estimated by neural network model.