Abstract
The Mechanisms of clean up of carbon monoxide and generation of carbon dioxide in getter ion pumps of various cathode materials are investigated with an ultrahigh vacuum mass spectrometer.
In order to obtain detailed information on the pumping action of getter ion pump for active, gases, the adsorption and oxidation of carbon monoxide on palladium films evaporated onto glass in ultrahigh vacuum are observed by the same means.
From the results, it is concluded that the dissociation of carbon monoxide molecules by the Penning discharge and the surface reaction on sputtered metal films are the principal factors for the clean up of carbon monoxide by getter ion pump.
