Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Interference Microscopy
Tadaaki YAMAMOTO
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JOURNAL FREE ACCESS

1967 Volume 36 Issue 3 Pages 158-179

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Abstract

The interference microscope is an integration of microscope and interferometers, the shapes of which can be classified as (1) Michelson, (2) Mach-Zehnder, (3) cyclic and (4) common-path or polarization interferometer. After introducing general principles of two-beam interferometry, the author reviews the techniques of interference microscopy and the principles of various types of interference microscopes according to the above-mentioned classification. Some remarks are given on its future possibilities including the use of lasers.

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© The Japan Society of Applied Physics
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