Transparent Conducting Film Produced by Heating the Vacuum Evaporated Film of Organic Acid Salt of Tin

Abstract

In this paper, the electrical and optical properties of transparent conducting films prepared by a vacuum evaporation of tin accetate (Sn(CH₃COO)₂) and subsequent heat treatment were investigated.
Such transparent conducting films were formed on the substrate of heated Pyrex glass plates by heating the Sn(CH₃COO)₂ evaporated film in air at a temperature range of 500_??_600°C. These properties are greatly influenced by the conditions of evaporation and the heat treatment proccess, especially, the wafer temperature (T_s) in vacuum evaporation, subsequent baking temperature (T_b) and its baking time (t_b). The minimum sheet resistivity and maximum transmission of the films were given at T_s =150°C, T_b=600°C and t_b_??_0.5 hour.
On investigating the X-ray diffraction patterns, it has been obtained that the films consisting of SnO₂ belong to a tetragonal system, and that the lattice constants a and c of the primitive cell are a=4.72Å and c=3.21Å respectively. The electrical and optical properties of the films are similar to the authentic sample in the literature with SnCl₄ as a starting material.