Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Film-Edge-Induced Stress and Defects in Silicon Substrates
Seiichi ISOMAE, Yukio TAKANO
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1984 Volume 53 Issue 2 Pages 94-102

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[in Japanese]
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© The Japan Society of Applied Physics
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