Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Formation of Thin Films by Ion Beam and Vacuum Euaporation (IVD Method)
Mamoru SATOU, Fuminori FUJIMOTO
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1984 Volume 53 Issue 3 Pages 195-198

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[in Japanese]
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© The Japan Society of Applied Physics
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