Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Maskless Ion Implantation Technique:
Be and Si Implantation in GaAs
Hisao HASHIMOTO, Eizo MIYAUCHI
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JOURNAL FREE ACCESS

1984 Volume 53 Issue 8 Pages 704-708

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[in Japanese]
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© The Japan Society of Applied Physics
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