Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Mechanism of Laser-Atomic Layer Epitaxy and Its Application
Takashi MEGURO, Sohachi IWAI, Yoshinobu AOYAGI
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Keywords: atomic layer epitaxy, laser, metalorganic vapor phase epitaxy, surface reaction
JOURNAL FREE ACCESS

1988 Volume 57 Issue 11 Pages 1728-1733

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[in Japanese]

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