Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Ultra-Precision Fabrication Technology and Its Application to Short-Wavelength Optics
Takeo MIYATA
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Keywords: soft X-ray optics, low-scatter mirrors, grazing incidence mirrors, multilayer mirrors, fresnel zone plates, manufacturing tolerance, manufacturing techniques, mate rial selection, ultra-precision polishing, surface characterization methods
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1989 Volume 58 Issue 6 Pages 842-858

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[in Japanese]

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