Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Step-controlled epitaxy in semiconductor SiC polytypes
Tsunenobu KIMOTO, Hiroyuki MATSUNAMI
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Keywords: polytype, silicon carbide, epitaxial growth, step-flow growth, step-controlled epitaxy, surface diffusion, step bunching
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1995 Volume 64 Issue 7 Pages 691-694

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[in Japanese]

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