Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Ti-Ni shape-memory alloy thin films
Derelopment for microactuators
Shuichi MIYAZAKI
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Keywords: TiNi, thin film, sputter-deposition, shape memory alloy, microactuator, micromachine
JOURNAL FREE ACCESS

2000 Volume 69 Issue 1 Pages 38-42

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[in Japanese]

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