Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Thin film technologies for advanced CMOS ULSIs
Hiroshi IWAI, Shun-ichiro OHMI
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Keywords: thin film, small geometry, silicon device, high performance, ULSI
JOURNAL FREE ACCESS

2000 Volume 69 Issue 1 Pages 4-14

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[in Japanese]

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