Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Large area VHF-PCVD system using array antenna type electrodes
Tomoko TAKAGI, Masashi UEDA, Norikazu ITO, Yoshimi WATABE
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Keywords: amorphous silicon, microcrystalline silicon, thin film deposition, large area, VHF, plasma enhanced chemical vapor deposition, double-sided, multi-zone
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2002 Volume 71 Issue 7 Pages 874-877

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[in Japanese]

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