Synthesis and characterization of Si-P-O-N amorphous ceramics derived from polymeric precursor

Abstract

Polyphosphanosilazane (POPHPS) was synthesized by chemical modification of perhydropolysilazane (PHPS) with phosphonic acid dimethyl ester. The synthesized polymeric precursor was found to contain some Si-O-P and N-O-P bonds by chemical structure analysis using NMR technique. Amorphous Si-P-O-N ceramics were obtained by pyrolysis of this precursor under Ar atmosphere at 900°C with about 90 mass% ceramic yield using TG analysis. These results indicated that POPHPS is excellent precursor for amorphous coating materials.