Fabrication of Micro-actuator using Aerosol Deposition Method

Jun Akedo; Maxim Levedev

doi:10.14853/pcersj.2002F.0.184.0

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.184.0

Conference information

Host: The Ceramic Society of Japan

Fabrication of Micro-actuator using Aerosol Deposition Method

Jun Akedo, Maxim Levedev

Author information

Keywords: Lead Zirconate Titanate, Alumina, ferroelectric material, Aerosol Deposition Method, piezoelecxtric material, MEMS, micro-actuator

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 184

Details

Abstract

The micro-actuator was fabricated using an aerosol deposition technique. The 2∼50-μm-thick lead zirconate titanate (PZT) films were directly deposited on stainless steel or Pt/Si substrates to fabricate the micro actuators. Performance of actuators was checked using Laser Doppler interferometer.

Content from these authors

Favorites & Alerts

Corresponding author

Register with J-STAGE for free!