Low temperature sintering of fine AlN powder synthesized by floating-type direct nitridation of Al

Noriyasu Hotta; Yoshifumi Hosomichi; Reki Yonezawa; Toshihide Tobizuka; Kunihiro Yanagida

doi:10.14853/pcersj.2002F.0.294.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.294.0

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Host: The Ceramic Society of Japan

Low temperature sintering of fine AlN powder synthesized by floating-type direct nitridation of Al

Noriyasu Hotta, Yoshifumi Hosomichi, Reki Yonezawa, Toshihide Tobizuka, Kunihiro Yanagida

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Keywords: Aluminium nitride, Direct nitridation, Fine powder, Low temperature sintering, High thermal conductivity

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Pages 294

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Abstract

Fine and pure AlN powder was synthesized at 1550 °C by floating-type fluidized-bed nitridation of Al powder. High conductive AlN ceramics of 170 W/mK were prepared by using the AlN powder with 7 wt% YF₃ additive at 1700 °C for 120 min in N₂ atmosphere. The grain size of AlN was 2∼3μm. In the case of using commercial AlN powder, high conductive AlN ceramics couldn’t be obtained.

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