An effect of Au on ZnO thin film growth during CVD process

Isao Sakaguchi; Die Ri; Yutaka Adachi; Daechul Park; Naoki Ohashi; Syun-ichi Hishita; Hajime Haneda

doi:10.14853/pcersj.2002F.0.333.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.333.0

Conference information

Host: The Ceramic Society of Japan

An effect of Au on ZnO thin film growth during CVD process

Isao Sakaguchi, Die Ri, Yutaka Adachi, Daechul Park, Naoki Ohashi, Syun-ichi Hishita, Hajime Haneda

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Keywords: Zinc oxide, Au, surface morphology

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 333

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Abstract

An effect of Au coating on ZnO growth during CVD process has been studied. The Au coating on substrate is effective to changesurface morphology ot ZnO thin film. The presence of Au on the ZnO surface was not detected by SAM and SIMS, indicating that there is no Au migration during ZnO growth. It is considered that Au acts the nucleation of ZnO.

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