Dielectric property of BaTiO₃/SrTiO₃ artificial superlattices

Abstract

Thin films of BaTiO and SrTiO₃ and their artificial superlattices on SrTiO₃(001) substrate were fabricated by molecular beam epitaxy process. The capacitance and the complex admittance of superlattices were measured by the impedance analyzer at 5MHz-110MHz. The electromagnetic analysis software has been used for the evaluation of the dielectric properties for the ultra thin film with interdigital electrodes formed by the electron beam lithography technique. In this study, it was cleared that the dielectric permittivity was changed by the period of the superlattice. The dielectric permittivity of [(BaTiO₃)₁₀/(SrTiO₃)₁₀]₄ superlattice was lager than those of other specimens.