Analysis of inhomogeneity of sintering in aluminum nitride based on local porosity

Junichi Tatami; Masahiro Namiki; Takeshi Meguro; Katutoshi Komeya; Makio Naito; Tadashi Hotta; Akira Kuibira; Hirohiko Nakata

doi:10.14853/pcersj.2002F.0.374.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.374.0

Conference information

Host: The Ceramic Society of Japan

Analysis of inhomogeneity of sintering in aluminum nitride based on local porosity

Junichi Tatami, Masahiro Namiki, Takeshi Meguro, Katutoshi Komeya, Makio Naito, Tadashi Hotta, Akira Kuibira, Hirohiko Nakata

Author information

Keywords: Aluminum Nitride, Sintering, Raw material, Inhomogeneity, Coarser grain, Local porosity

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 374

Details

Abstract

Influence of coarser grains on sintering of AlN was investigated. Densification of AlN was limited by addition of coarser grains. Large pores were observed near the coarser grains. Local porosity showed higher value in the vicinity of coarser grain than any other area. It was found that the pore grew up during sintering. These phenomena probably resulted from not only inhomogeneity of density of green body but also insufficiency of oxygen near coarser grain.

Corresponding author

Register with J-STAGE for free!