Fabrication of periodic structures of organic-inorganic hybrid material by laser interference

Abstract

We report on a search of photopolymerizable sol-gel organic-inorganic films with a higher refractive index and a fabrication of two dimensional periodic microstructures in the film by laser interference technique. The sol-gel films were prepared from organosilicate alkoxide and titanium alkoxide modified by methacrylic acid, which contain the photopolymerizable function. The refractive index of the film increases with the increase of titanium alkoxide. The film with the highest refractive index is exposed to interference light and the unexposed parts are removed. And then a two-dimensional periodic structure, in which the materials are arranged square lattice in about 1.7μm spacing, is produced.