Synthesis of Yttrium Stabilized Zirconia by LASER thermal CVD

Teiichi Kimura; Robret Vargas; Takashi Goto

doi:10.14853/pcersj.2002F.0.77.0

Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.77.0

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Host: The Ceramic Society of Japan

Synthesis of Yttrium Stabilized Zirconia by LASER thermal CVD

Teiichi Kimura, Robret Vargas, Takashi Goto

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Keywords: YSZ, CVD, LASER, MOCVD, thermal barrier, thermal shock resistance

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Pages 77

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Abstract

LASER thermal CVD was newly developed and employed to synthesize YSZ films on alumina substrates. High deposition rate of several hundreds μm/h was achieved by supplying high concentrate MO gas on the substrate. Microstructres of deposited films were changed with incident LASER power. Effect of LASER power on the microstructures and the deposition rates was investigated.

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