Abstract
A multi-beam laser interference (MLI) is known to be one of the fabrication techniques of photonic crystals (PhCs), which have a periodic structure of refractive index on a scale of the wavelength of light. In this paper, we report that PhCs of organic-inorganic hybrid material are fabricated by MLI. Organic-inorganic hybrid films were prepared from metal alkoxides and photosensitive organics by the sol-gel method, and the films were exposed to MLI of femtosecond pulses at 800nm and were developed by 1-PrOH. The highly exposed parts were polymerized, and the polymerized parts remained as pillars on the substrate after the development process. The remained pillars and air formed two-dimensional periodic PhC structures. In the different fabrication conditions, new structures, in which the upper parts of some adjacent pillars were colliding, were also produced by self-organization of each pillar.
