ITO Transparent Conducting Films Prepared by Spray Pyrolysis Deposition

Abstract

Spray pyrolysis deposition (SPD) is the most attractive thin film processing techniques, since the films are prepared by a simple apparatus at low cost. Tin-doped In₂O₃ (ITO) transparent conducting films have been prepared by SPD. The films were deposited from a mixture of Indium acetylacetone and di-n-butyltin diacetale on a glass at the substrate temperature of 500°C by compressed air, oxygen or nitrogen gas. The electrical properties of films were measured. The electrical resistivity was sensitive to carrier gas. The films deposited by oxygen shows the lowest resistivity of 1.5x10^-4 Ω•cm, and the average transmission of 80% in the visible range.