Abstract
The lattice parameter of Aluminum Nitride (AlN) was investigated by introducing a carbo-thermal reduction step in hot press sintering for several kinds of conventional AlN powder. In order to control the oxygen content, various amounts of carbon were added to the AlN raw powder without sintering aids. X-ray diffraction data was analyzed by the WPPD (Whole-Powder-Pattern-Decomposition) method to obtain precise lattice parameters. The unit cell volume calculated from the lattice parameters was in proportion to the oxygen concentration for all the samples and raw powders. This result is agrees well with the model of Harris dealing with unit cell volume rather than the model of Slack that proposes the proportional relationship between the c-axis parameter and the oxygen concentration.
