Abstract
A novel method of ceramics coating, named as aerosol deposition method (ADM), is based on particle collision and is a high performance technique for fabrication of piezoelectric 1-100μm thick film. High deposition rate, low process temperature (less than 600oC) as well as micro-patterning of PZT are very attractive for MEMS, and μ-TAS applications. In this presentation, the performance of Si cantilever and Si diaphragm driven by PZT thick film deposited by ADM were reported. After fabrication of delicate Si thin structure with thickness less than 100μm, PZT layers were deposited by ADM on there. As the results, there were no damage of the Si structure. Displacement of 65μm-thick Si diaphragm driven by PZT film was 24μm at resonance of 24 kHz driven by 8 V. In case of micro-mirror devise, resonant frequency and -3dB bandwidth are 33.4 kHz and 27 Hz, respectively.(This research is partially supported by NEDO Project.)
