Abstract
We investigated preparation of perovsikte oxide film by electron beam physical vapor deposition (EB-PVD). The evaporation source was La0.8Sr0.2MnO3 and the substrate was disc of 8mol% Y2O3 stabilized ZrO2. Homogeneous film was obtained by examinations of EB power and scanning pattern. Columnar-structured film was successfully deposited by EB-PVD. Composition of the deposited film was almost same as that of evaporation source. The XRD pattern of the deposited film showed single phase which was indexed by cubic cell different from that of evaporation source. The substrate preheating temperature influenced the surface morphology and columnar structure of the film. At relatively low preheating temperature the film had fine surface morphology and unclearly columnar structure. At relatively high preheating temperature the film had roughly surface morphology and clearly columnar structure. This work was performed as a part of the Nanostructure Coating Project carried out by the New Energy and Industrial Technology Development Organization.
