Effects of Beta-Diketone Additions on the Crystallinity of Alkoxy-Derived Zirconia Thin Films

Kaori NISHIZAWA; Takeshi MIKI; Kazuyuki SUZUKI; Desheng FU; Kazumi KATO

doi:10.14853/pcersj.2003F.0.90.0

16th Fall Meeting of The Ceramic Society of Japan & The 5th International Meeting of Pacific Rim Ceramic Societies(PacRim5)

Session ID : 01-P-42

DOI https://doi.org/10.14853/pcersj.2003F.0.90.0

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Host: The Ceramic Society of Japan

Effects of Beta-Diketone Additions on the Crystallinity of Alkoxy-Derived Zirconia Thin Films

*Kaori NISHIZAWA, Takeshi MIKI, Kazuyuki SUZUKI, Desheng FU, Kazumi KATO

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Abstract

Zirconia precursor solutions were prepared using zirconium tetra-n-butoxide and acetylacetone. The crystallinity of the 673K-annealed zirconia thin films was enhanced by acetylacetone addition and UV irradiation using an ultra-high pressure mercury lamp. The effects of UV irradiation on the crystallinity of thin films have changed by amounts of acetylacetone. It was suggested that the orientation of polymerization, degrees of polymerization and the stability of non-crystalline thin films on UV irradiation have changed by amounts of acetylacetone.

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