Abstract
TiO2 hybrid gel films were prepared from titanium butoxide chemically modified with 1,3-diphenyl-1,3-propanedione (DBM) and methacrylic acid by using sol-gel method. The absorption peak assigned to π-π* transition of β-diketonate chelate between Ti alkoxide and DBM decreased with the increase of UV irradiation time. By the structural change in UV irradiated parts on the film, solubility in alcohol differs from the UV irradiated to unirradiated parts. The TiO2 film is exposed to interference light and the unexposed parts are removed, and then a two dimensional periodic structure is produced.
