Abstract
Isotopic exchange of 18O with16O in sol-gel derived titania films containing 18O was investigated by temperature programmed desorption (TPD) and secondary ion mass spectrometry (SIMS). The TPD experiment showed that oxygen evolved only in the form of the adsorbed water : the TPD curves of M/z=18 and M/z=20. The ratio of 18O to (18O +16O) was 13at.%. SIMS profiles of 18O and 16O in a titania film fired to 350°C in a TPD apparatus were measured. The ratio of 18O to (18O +16O) in the film was 14at.%.