Preparation of barium titanate thin films using nano-sized crystalline particles

Abstract

Barium titanate thin films have been prepared using the barium titanate nano-sized particles dispersed solution. In this study, we made barium titanate thin films at various heat treatment temperature, and the characteristic evaluation was carried out. Then , the dielectric constant was improved at 750°C, and the dielectric loss was improved at 550°C. We think these results suggest that grain size was increased at 750°C, and residual organic group and -OH group were decreased at 550°C.