Electrical Breakdown Properties of Ceramic thin layer formed by Aerosol Deposition Method

Abstract

Electrical breakdown of Al2O3 and PZT thick films deposited using aerosol deposition method are investigated. The thickness of films were 1~10 mm. Minimum value of electrical breakdown of alumina over 2 MV/cm was and PZT over 500 kV/cm were achieved. Breakdown electrical filed of alumina increases increasing layers thickness, which is contrary to PZT films' property.