Abstract
Thin film heaters made of lanthanum chromium oxide (LaCrO3) have been fabricated with RF magnetron sputtering method. Thin film of Sr doped LaCrO3 oriented in the direction of (220) or (004) compared with Ca doped that. In general, the resistance of the films decreases at higher concentrations of Ca or Sr. In the same Ca or Sr mixing ratio, the resistance of Ca doped LaCrO3 heater was smaller than Sr doped that. However, the electric stability of the films became poor with increasing amount of Ca or Sr. Thin film was uniformly heated. EPMA results of these thin films before and after heating showed no difference of composition, while the evaporation of chromium atoms from thin films under cathode Pt electrodes was suggested. When the thin film electric heater was heated to high temperature, it was destroyed by the inner stress due to the thermal expansion of the substrate. The maximum heating temperature was over 1300°C by using a thick substrate.
