Inside Structure Analyzed by x-ray Diffraction and Application to Functional Ceramic Films

Abstract

X-ray diffraction method was demonstrated on the inside structure analysis of ceramic layer. The independent peak patterns of inside layer were obtained by an extension of thin film X-ray diffraction method. By this method, the diffraction patterns of the inside structure of ceramic layer was determined by the subtraction those of the shallow layer. In the bio-functional calcium phosphate coatings, the crystallinity of the inside layer were clearly revealed.