Synthesis of barium titanate ultrafine particles by RF plasma CVD method

Abstract

RF-plasma CVD method is one of the most useful methods for preparing ceramic nanoparticles. BaTiO₃ nanoparticles were synthesized by this method using metalorganic sources as raw materials. Perovskite type BaTiO₃ phase was confirmed by XRD as major products. The particle size of BaTiO_{3/ nanoparticles was about 15nm, and they were well crystallized.}