Abstract
Ethyleneglycolates of Fe, Ni and Cu were synthesized and them mixed with TEOS to prepare homogeneous solutions. The solutions were diluted by acetone and sprayed ultrasonically. The mist was carried by N2 into a reactive tube heated at 100-800°C and pyrolyzed to form product particles. Although the as-prepared particles contained many undecomposed species, metal nano particles dispersed silica micro spheres could be obtained by post-annealing at 700-900°C in N2-H2 stream.