Fabrication and Dielectric Properties of Barium Titanate Thin Films by Nanocrystal Electrophoretic Deposition

Makoto Kuwabara; Yong Jun Wu; Juan Li; Hidetaro Tanaka

doi:10.14853/pcersj.2004F.0.166.0

17th Fall Meeting of The Ceramic Society of Japan

Session ID : 3J01

DOI https://doi.org/10.14853/pcersj.2004F.0.166.0

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Host: The Ceramic Society of Japan

Fabrication and Dielectric Properties of Barium Titanate Thin Films by Nanocrystal Electrophoretic Deposition

*Makoto Kuwabara, Yong Jun Wu, Juan Li, Hidetaro Tanaka

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Keywords: Nanocrystal, Barium titanate, Electrophoretic deposition, Monodisperse suspension, Dielectric property

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Abstract

We fabricated barium titanate thin films with a very uniform microstructure by the electrophoretic deposition method using a monodisperse suspension of sol-gel-derived BaTiO3 crystalline particles of 10 nm in diameter, and investigated the microstructure and dielectric properties of BaTiO3 ceramic thin films obtained by adding some sintering aids to the precursor films and then sintering them at a temperature below 800C.

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