MEMS Based Sensors and Lab-on-a-Chip for Acid-rain Monitoring

Shin-ichi WAKIDA; Takashi MIYADO; Hidenori NAGAI; Yoshihide TANAKA; Shigeru KUROSAWA; SAHORI TAKEDA

doi:10.14853/pcersj.2004F.0.282.0

17th Fall Meeting of The Ceramic Society of Japan

Session ID : 1M08

DOI https://doi.org/10.14853/pcersj.2004F.0.282.0

Conference information

Host: The Ceramic Society of Japan

MEMS Based Sensors and Lab-on-a-Chip for Acid-rain Monitoring

*Shin-ichi WAKIDA, Takashi MIYADO, Hidenori NAGAI, Yoshihide TANAKA, Shigeru KUROSAWA, SAHORI TAKEDA

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Keywords: Titanium Nitride, Thin Film, Plasma-enhanced CVD, Ion-selective Field-effect Transistors, Microfluidics

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

We investigated ISFETs using new sensing material to monitor the primary components. We can successfully demonstrate single drop acid-rain analysis for real rainwater using pH and nitrate checkers using direct potentiometry. We also challenged high throughput analysis using Lab-on-a-Chip technology. We obtained preliminary results for nitrate analysis within 20 sec.

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