Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
17th Fall Meeting of The Ceramic Society of Japan
Session ID : 3E17
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Host: The Ceramic Society of Japan

Evaluation of SiN thin film for waveguides
*Yosuke Akita, junichi kageyama, kenji kintaka, junji nishii, Kazuyuki Hirao
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Keywords: SiN, waveguide, CVD
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[in Japanese]
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© The Ceramic Society of Japan 2004
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