Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
17th Fall Meeting of The Ceramic Society of Japan
Session ID : 2L13
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Host: The Ceramic Society of Japan

The low energy molecular design and shape development of polymethylsilsesquioxane hybrid and ceramic films
*Manabu Fukushima, Eiichi Yasuda, Hideki Kita, Hayato Kawabata, Yasuhiro Tanabe
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Keywords: organic-inorganic hybrid, polymethylsilsesquioxane, low energy manufacturing, silicon oxycarbide, silicon carbide
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[in Japanese]
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© The Ceramic Society of Japan 2004
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