Development of SiC Micro Materials from Si-based Polymers cured by Radiation

Abstract

We found that PCS fiber as a SiC precursor could be cured by EB oxidation only surface part of the fiber, and developed the hollowing process after curing of the PCS fiber by extracting of the un-crosslinked core. The SiC micro tube has high corrosion resistance in addition to high strength and heat resistance, therefore it could be applied to the ceramic filter, adsorbent, catalyst and micro-reactor.