Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Preprints of Annual Meeting of The Ceramic Society of Japan, 2004
Session ID : 1H35
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Host: The Ceramic Society of Japan

Application of Diamond film on ceramics components for plasma process
*Ryuichi Shoji, Yukinori Nakamura, Yoshimasa Kondo, Naoto Ohtake
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Keywords: diamond, corrosion resistance, CVD
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[in Japanese]
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© The Ceramic Society of Japan 2004
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